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PVA PRODUCTS FOR SPEEDFAM-IPEC CMP
TOOLS |
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NEPTUNE: |
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26mmOD X 11mm ID X
250mm Length |
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CAPELLA: |
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30mmOD X 17mm ID X
220mm Length |
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SPEEDFAM AURIGA and SPEEDFAM AURIGA C: |
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48mmOD X 26mm ID X
102mm Length |
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48mmOD X 26mm ID X
146mm Length |
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30mmOD X 17mm ID X
120mm Length |
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30mmOD X 17mm ID X
170mm Length |
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30mmOD X 17mm ID X
205mm Length (non-nodule) |
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